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Nanomanufacturing Science Lab
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The lab processes material surfaces with nanometer-level precision using plasma and electrochemistry.
AboutAbout the lab
New processing methods that challenge conventional wisdom
The Nanomanufacturing Science Lab (Yamamura Lab) studies processes that machine material surfaces using atmospheric-pressure plasma and electrochemical reactions.
The atmospheric-pressure plasma processes consist of plasma CVM for shaping, plasma-assisted polishing for surface finishing, and surface treatment to improve the adhesion of resins.
The lab also works on a polishing method for conductive, hard, and brittle materials such as SiC, in which the surface is softened by anodic oxidation and then removed with soft fixed abrasives.
This lab is located in the Research Center for Precision Engineering, which is affiliated with the Graduate School of Engineering at Osaka University.
Key terms
- Plasma CVM (Chemical Vaporization Machining)
- A dry etching process for shaping, in which a reactive plasma generated locally in the atmosphere is scanned over the surface
- Plasma-assisted polishing
- A dry polishing process in which the surface is modified by plasma irradiation and the modified layer is then removed with soft abrasives
- Anodic oxidation (anodization)
- A treatment that oxidizes the surface of a material by applying a voltage. This lab uses it to soften the surface.
NewsLab news
A paper first-authored by a doctoral student was published in the Journal of Materials Processing Technology
A paper first-authored by a doctoral student was published in Nanomanufacturing and Metrology
A paper first-authored by a doctoral student was published in Diamond & Related Materials
A master's student received an award at the Kansai Branch Regular Academic Lecture Meeting (FY2026) of the Japan Society for Precision Engineering
A paper first-authored by Assistant Professor Rongyan Sun was published in CIRP Annals - Manufacturing Technology
ResearchResearch themes
The Yamamura Lab works on developing new physicochemical machining processes. Using atmospheric-pressure plasma and anodic oxidation, it studies methods for finishing the surfaces of hard materials that are difficult to machine.
*Illustrative imageNanomanufacturing Using Plasma
These are surface-generation processes that use atmospheric-pressure plasma. Plasma CVM is used for shaping, plasma-assisted polishing for finishing, and plasma treatment combined with heating to improve the adhesion of resins.
*Illustrative imageNanomanufacturing Using Electrochemistry
The surfaces of conductive, hard, and brittle materials such as SiC are modified and softened by anodic oxidation. The lab aims to develop a slurry-free polishing method that removes this layer without damage, using soft fixed abrasives.
MembersFaculty
The members of the Nanomanufacturing Science Lab (Yamamura Lab) consist of faculty, research fellows, doctoral students (including working-professional doctoral students), master's students, technical assistants, and secretaries.As of 2026
- Distinguished ProfessorKazuya Yamamura
- Associate ProfessorYuji Ohkubo
- Assistant ProfessorRongyan Sun
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Plasma Rapid Oxidation Technique for Extending Component Tenabil (KSC-20221102-PH-KLS01 0018)” Kim Shiflett / Public domain (cropped)
- Nanomanufacturing Using Plasma: “Buse plasma à pression atmosphérique” Acxys / CC BY-SA 3.0 (cropped)
- Nanomanufacturing Using Electrochemistry: “U.S. Department of Energy - Science - )” U.S. Department of Energy from United States / Public domain (cropped)
- Related lab (原子制御プロセス領域): “Scanning tunneling microscope-MHS 2237-IMG 3816” Rama / CC BY-SA 3.0 fr (cropped)
- Related lab (超精密加工領域): “Optician Polishing Large CXO Mirror Shell At HDOS (illustrations-mirrorFab-Optician Polishing Large CXO Mirror Shell At HDOS - 1-300)” NASA/SAO / Public domain (cropped)
- Related lab (ナノ表面界面工学領域): “Scanning tunneling microscope-MHS 2237-IMG 3817-white” Rama / CC BY-SA 3.0 fr (cropped)
- Related lab (バイオ情報計測学講座
[情報科学研究科] ): “Thermo - Finnigan LCQ Mass Spectrometer ( )” Kitmondo Marketplace / CC BY 2.0 (cropped)
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