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半導体プロセス科学部門
Showing the original Japanese · View translation
プラズマを計測して半導体の製造工程を解き明かす研究部門。
AboutAbout the lab
プラズマを計測して、半導体づくりを科学する。
半導体プロセス科学部門は、
センターが
その
Key terms
- プラズマ気相・
表面診断 - プラズマ中の
気体の 状態と、 加工される 表面の 状態を、 測定して 調べる 技術 - 時
空間分布 - 時間の
経過と 場所の 違いに よって、 量が どう 変わりどう 広がっているかを 表した もの
ResearchResearch themes
半導体プロセス科学部門は、
MembersFaculty
半導体プロセス科学部門の
- Professor石川 健治
- Project Professor唐橋 一浩
- Project Associate ProfessorNGUYEN Thi-Thuy-Nga
- Project Lecturer馬 緻宇
- Project Assistant ProfessorOSONIO Airah Peraro
VoicesStudent voices
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Write a lab reviewAnonymous · Your draft is saved if you stopRelatedLabs similar to 半導体プロセス科学部門
グリーンDXプラズマ部門
プラズマ科学部門
プラズマバイオ部門低温プラズマ科学研究センター プラズマバイオ部門名古屋大学低温プラズマ科学研究センターThe information on this page is compiled by the LabLog team from the lab's public information and interviews. For corrections or removal requests, please contact LabLog, not the lab.
Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Plasma globe with looped filament” Xyqorophibian / CC BY-SA 4.0 (cropped)
- 半導体製造プラズマプロセスの
計測と 創出: “Clean room” Uploaded by Duk 08:45, 16 Feb 2005 (UTC) / Public domain (cropped) - Related lab (グリーンDXプラズマ部門
（Ngo Van Nong） ): “Coils of the "Ministellarator" experiment at IPP Greifswald” Siarhei V / CC BY-SA 4.0 (cropped) - Related lab (プラズマ科学部門
（堤 隆嘉） ): “Pegasus Toroidal Experiment ( )” troop_156_glenview / CC0 (cropped) - Related lab (プラズマバイオ部門): “Laboratory of Dust Plasma Diagnostics” Stanislav Liubauskas / CC BY 4.0 (cropped)
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