Labs in Nagoya University, Low-Temperature Plasma Science Research Center, Division of Semiconductor Process Science

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The lab studies semiconductor manufacturing processes by measuring plasmas.

The lab is one of the divisions of the Center for Low-temperature Plasma Sciences, and it studies how to scientifically understand the plasma processes used to make semiconductor devices. Using the center's plasma gas-phase and surface diagnostic technologies, the lab measures the density, energy, and spatiotemporal distribution of reactive atoms and molecules during processing. Building on this understanding, the lab aims to create innovative plasma manufacturing processes for next-generation semiconductor device integration.

#Plasma processing #Plasma gas-phase and surface diagnostics #Next-generation semiconductor devices