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プラズマエレクトロニクス研究グループ
Showing the original Japanese · View translation
低温プラズマをつくり、測り、半導体や材料づくりに生かす研究室。
AboutAbout the lab
低温プラズマ × 計測 ×材料プロセス
内田・鈴木研究室は、
放電や
画像計測や
半導体の
Key terms
- 低温プラズマ
- 電子や
イオンを 含む 電離した気体の うち、 気体全体の 温度が 低い もの。 半導体の 加工などに 使われる - スパッタ成膜
- プラズマ中の
イオンを 材料に ぶつけ、 はじき出された 原子を 基板に 積もらせて 薄い 膜を つくる 方法 - 高アスペクト比構造
- 幅に
比べて 深さや 高さが ずっと 大きい、 細長い 溝や 穴などの 構造
ResearchResearch themes
低温プラズマの
*Illustrative imageスパッタ成膜でナノ構造の膜をつくる
スパッタ成膜
*Illustrative image画像でプラズマを立体的に見る
いく
*Illustrative image細く深い構造の中の粒子の動き
半導体の
MembersFaculty
- Professor内田 儀一郎
- Associate Professor鈴木 陽香
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エネルギー制御工学The information on this page is compiled by the LabLog team from the lab's public information and interviews. For corrections or removal requests, please contact LabLog, not the lab.
Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Bell Jar 35 with Argon Plasma” Diener electronic GmbH + Co KG / CC BY-SA 4.0 (cropped)
- スパッタ成膜で
ナノ構造の 膜を つくる : “Princip naprašování” Vítězslav Lamač / CC BY-SA 4.0 (cropped) - 画像で
プラズマを 立体的に 見る : “Glow discharge regions” Derived file: Chetvorno Original file: Jannis Andrija Schnitzer / CC BY-SA 2.0 (cropped) - 細く
深い 構造の 中の 粒子の 動き: “Minimal Fab exhibit at Tsukuba Science Square 7” Syced / CC0 (cropped) - Related lab (生命エレクトロニクス研究グループ): “Plasma-filaments” The original uploader was Iantresman at English Wikipedia. / CC BY 2.5 (cropped)
- Related lab (プラズマエネルギー工学研究グループ): “TFTR 1989” Princeton Plasma Physics Laboratory / CC BY 3.0 (cropped)
- Related lab (プラズマナノプロセス科学研究グループ): “Plasma Pencil” Entropi5 / CC BY-SA 3.0 (cropped)
- Related lab (エネルギー制御工学
（S） 研究グループ): “Silicon heterojunction solar cell” Radiotrefoil / CC BY-SA 4.0 (cropped)
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