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Inorganic Materials × Deep-UV Laser Process Lab
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The lab studies semiconductor devices and oxide materials using ultraviolet lasers.
AboutAbout the lab
Exploring new semiconductor manufacturing methods with ultraviolet lasers.
The Inorganic Materials × Deep-UV Laser Process Lab studies new manufacturing processes for semiconductor devices using ultraviolet lasers, as well as new semiconductor and dielectric materials, mainly oxides.
The lab develops processes that irradiate materials with pulses of excimer laser light, a powerful form of ultraviolet light, to change the properties of semiconductors and to form thin films.
It also investigates the physical properties of inorganic materials used in devices, such as oxide semiconductors and dielectrics, and their application to devices.
On the lab's website, it is introduced under the name "Yabuta Lab."
Key terms
- Excimer laser
- A device that produces pulses of powerful ultraviolet light. In this lab, it is used to change the properties of semiconductor materials and to form thin films.
- Oxide semiconductor
- A semiconductor made from an oxide. Examples include IGZO, which shows excellent semiconductor characteristics even in low-temperature processes.
- Dielectric
- A material used in semiconductor devices for gate insulating films and capacitor films.
NewsLab news
Paper published: thermal simulation of laser doping in β-Ga2O3
Paper published: Sn doping of β-Ga2O3 using a KrF excimer laser
ResearchResearch themes
The lab studies new manufacturing processes for semiconductor devices using ultraviolet lasers, as well as new semiconductor and dielectric materials, mainly oxides. Through the development of new semiconductor devices and materials, it also aims to train people who can contribute to the industries of the future.
*Illustrative imageManufacturing Processes Using Deep-UV Lasers
The lab develops manufacturing processes that irradiate materials with powerful ultraviolet pulses from an excimer laser to change semiconductor properties as desired or to form the semiconductor thin films needed for devices. This work is carried out in joint research with laser manufacturers, with use in next-generation semiconductor device manufacturing in mind.
Oxide Semiconductor and Dielectric Materials
The lab studies the physical properties and devices of oxide semiconductors (such as IGZO) that show excellent semiconductor characteristics in low-temperature processes. It also works on complementary transistors that use n-type and p-type oxide semiconductors in the same device, dielectrics used for gate insulating films, and piezoelectric and ferroelectric materials.
MembersFaculty
The members of the Inorganic Materials × Deep-UV Laser Process Lab are faculty, research fellows, visiting professors, and doctoral, master's, and undergraduate students.As of 2026
- ProfessorHisato Yabuta
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Metal Oxide TFT Cross Section” NoAppliedVoltage / CC BY-SA 4.0 (cropped)
- Manufacturing Processes Using Deep-UV Lasers: “Excimer laser 1” IoOALP / CC BY-SA 4.0 (cropped)
- Related lab (Micro/Nano Laser Devices Lab): “Lasers” 彭嘉傑 / CC BY 2.5 (cropped)
- Related lab (Functional Integrated Systems Lab): “SJ3159 die” Mister rf / CC BY-SA 4.0 (cropped)
- Related lab (Atomic Layer Process Science Lab): “Filling with hazardous reagents for the atomic layer growth process” R Ashurov / CC BY 4.0 (cropped)
- Related lab (Integrated Magnetic Devices Lab): “2019 Rozebrane dyski twarde” Jacek Halicki / CC BY-SA 4.0 (cropped)
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