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Ikehashi Lab
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A lab that applies micron-scale machines to sensors and IoT.

AboutAbout the lab
Micron-sized machines, brought into the world of sensors
The Ikehashi Lab studies applying tiny mechanical components called MEMS to sensors and other devices.
MEMS are systems built with microfabrication technology that combine electronics and mechanical engineering.
Some MEMS products, such as accelerometers and pressure sensors, are already used in everyday life.
Looking ahead to the IoT era, in which large numbers of small, low-cost sensors are used, the lab works on everything from creating new sensors to integrating them with circuits.
Key terms
- MEMS
- Microelectromechanical systems: systems made by semiconductor microfabrication that integrate micron-sized mechanical parts with electronic circuits
- Microfabrication
- Technology that uses light and chemicals to form shapes finer than a human hair on a silicon wafer
- Resonator
- A component that vibrates strongly at a specific frequency. It is used to set signal frequencies
ResearchResearch themes
The lab studies MEMS, which apply micron-sized mechanical components to sensors and other devices. With the IoT era, in which large numbers of small, low-cost sensors are used, already here, the lab believes MEMS will become ever more important and takes various approaches to MEMS devices.
*Illustrative imageMEMS Sensors
The lab works on creating new sensors that have not yet been realized with MEMS, and on improving the accuracy of MEMS sensors using signal processing techniques. Subjects include mode-localized sensors, vibrometers, gyroscopes, and flow sensors.
*Illustrative imageMEMS Application Systems
This research combines commercially available MEMS sensors and applies them to IoT systems. Rather than building sensors from scratch, the lab devises new mechanisms from the user's side.
*Illustrative imageMEMS-Circuit Integrated Devices
This research improves the performance of integrated circuits by exploiting a mechanical advantage of MEMS: high-Q resonators are easy to fabricate.
MembersFaculty
- ProfessorTamio Ikehashi
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Microstructure1234” Denis Elbl, KIT / CC BY-SA 4.0 (cropped)
- MEMS Sensors: “Mpu6050-HD” ZeptoBars / CC BY 3.0 (cropped)
- MEMS Application Systems: “CSIRO ScienceImage 10917 One of CSIROs floating nodes monitoring Lake Wivenhoe” division, CSIRO / CC BY 3.0 (cropped)
- MEMS-Circuit Integrated Devices: “UK VP MYS 623 TAHV0” Epop / CC0 (cropped)
- Related lab (Takahata Lab): “Silicon Photonics 300mm wafer” Ehsanshahoseini / CC BY-SA 4.0 (cropped)
- Related lab (Tanzawa Lab): “TI AHC08 Die Shot (4x2-Input AND Gate)” Cole L / CC BY-SA 2.0 (cropped)
- Related lab (Yoshimasu Lab): “Compact AIS antenna” ESA – G. Porter / CC BY-SA 3.0 (cropped)
- Related lab (Kimura Lab): “1645RT2U-HD” ZeptoBars / CC BY 3.0 (cropped)
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