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Scanning Electron Microscope Lab
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The lab develops core technologies for scanning electron microscopes (SEMs) through industry-academia collaboration.
AboutAbout the lab
Improving SEM performance and creating new applications.
The Hitachi High-Tech Advanced SEM Technology Lab studies core technologies for scanning electron microscopes (SEMs) in industry-academia collaboration with Hitachi High-Tech.
SEMs can observe fine structures at the nanometer scale, and samples are easy to handle, so they are used in a wide range of fields, including nanotechnology and biotechnology.
The lab tackles more difficult challenges in core SEM technologies such as electron guns and signal detectors, aiming to develop technologies that achieve high resolution, high precision, and high throughput.
The lab says it aims to apply the results of the industry-academia collaboration between Hitachi High-Tech and the University of Tsukuba to product improvement, and to develop new SEMs and products that apply them.
Key terms
- Scanning electron microscope (SEM)
- A microscope that can observe fine structures at the nanometer scale. Samples are easy to handle, and it is used in research and development across a wide range of fields.
- Electron gun
- One of the core SEM technologies. The component that emits the electron beam directed at the sample.
- Open facility equipment
- Shared-use instruments of the Innovative Measurement Technology Development Research Center. Equipment used by labs in various fields.
NewsLab news
View More ↗ResearchResearch themes
The lab works on core SEM technologies such as electron guns and signal detectors, aiming to improve SEM performance and create new applications. The Project Research Building houses a Hitachi High-Tech TM4000Plus tabletop scanning electron microscope and an SU7000 ultra-high-resolution Schottky scanning electron microscope, which are used by labs in various fields as open facility equipment.
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MembersFaculty
The members of the Hitachi High-Tech Advanced SEM Technology Lab consist of faculty (Specially Appointed Professors, Project Professors, Professors, Project Assistant Professors, and others), visiting faculty and researchers, Principal Researchers, Researchers, Professors Emeritus, and administrative staff.As of 2026
- Specially Appointed ProfessorMasahide Ito
- Project ProfessorTakashi Sekiguchi
- ProfessorYasunari Sohda
- Project Assistant ProfessorAkio Ogura
- Project Assistant ProfessorYao Yao
- Project Assistant ProfessorRyohei Tsuruta
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Scientist during work with Scanning Electron Microscope” Gabriela P. / CC BY 4.0 (cropped)
- Development of core SEM technologies: “Scanning electron microscope - UFCH JH (2020) 01” Tadeáš Bednarz / CC BY-SA 4.0 (cropped)
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