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Soft X-ray Ultrafine Processing Lab
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The lab directly microfabricates glass and other materials using soft X-ray light.

AboutAbout the lab
Carving glass with light
The Makimura Lab studies the interaction between light and matter, and the microfabrication that applies it.
In particular, it focuses on research into directly processing materials with light at wavelengths of around 10 nm (extreme ultraviolet light and soft X-rays).
This processing method is expected to serve as a practical way to fabricate chemical analysis and chemical synthesis devices that handle extremely small sample volumes, and is also expected to contribute to biotechnology and chemistry.
Key terms
- Soft X-rays
- A type of light with a wavelength of around 10 nm. The lab uses it to process materials directly.
- Silica glass
- Glass with the composition SiO2. Also called synthetic fused quartz glass.
- PDMS
- Abbreviation for polydimethylsiloxane. One of the materials the lab has shown it can finely process.
ResearchResearch themes
The lab studies the interaction between light and matter, and the microfabrication that applies it. Its research centers on directly processing materials with light at wavelengths of around 10 nm (extreme ultraviolet light and soft X-rays).
View More ↗MembersFaculty
- Associate ProfessorTetsuya Makimura
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Extreme ultraviolet lithography tool” Lawrence Livermore National Laboratory / Public domain (cropped)
- Direct Processing of Materials with Soft X-rays: “TXPES beamline at SESAME” Erkcan / CC BY-SA 4.0 (cropped)
- Related lab (光物性理論研究室): “Laser optique” 作者不詳 / Public domain (cropped)
- Related lab (走査電子顕微鏡): “Scientist during work with Scanning Electron Microscope” Gabriela P. / CC BY 4.0 (cropped)
- Related lab (X線結像
光学): “Lab based Soft X-ray Microscope- SiriusXT” Ananya Vatsa / CC BY-SA 4.0 (cropped) - Related lab (原子分子光理論研究室): “Laser with amplifier” Tourbillon / CC BY-SA 3.0 (cropped)
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