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Nano Fabrication and Metrology Lab
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The lab explores micro- and nano-scale fabrication and measurement using light.
AboutAbout the lab
Measuring and fabricating the nano world with light.
The Nano Fabrication and Metrology Lab (Takaya-Mizutani Lab) studies fabrication and measurement at the micrometer and nanometer scale, which form the foundation of manufacturing.
In addition to precision measurement and fabrication using light, the lab works on AI techniques such as machine learning and deep learning, as well as measurement using entangled photon pairs.
The lab's guiding philosophy is "Challenge and Surpass": to take on challenges boldly rather than settle for the status quo, overcome difficulties, and surpass oneself in research.
Key terms
- Optical Frequency Comb
- A light source with a large amount of precise frequency information. It is used for surface profile measurement.
- Photonic Nanojet
- A special light beam that combines a small beam diameter with a long depth of focus.
- Entangled Photon Pair
- A pair of light particles with quantum correlations not seen in classical light.
NewsLab news
"Precision Metrology", co-authored by Associate Professor Mizutani, was published by Asakura Publishing
A paper by Assistant Professor Uenohara et al. was published in Int. J. Automation Technol.
A paper on surface profile measurement by the phase retrieval method was published in Int. J. Automation Technol.
ResearchResearch themes
The lab studies precision techniques that apply light, centered on fabrication and measurement at the micrometer and nanometer scale. Its research is divided into three areas: laser-based nanometrology and nano-fabrication techniques, manufacturing and assembly techniques for nanometrology systems, and next-generation precision measurement methods based on AI and quantum optics.
*Illustrative image3D Measurement with a Nano-CMM
The lab measures three-dimensional shapes using a sphere a few micrometers in diameter, laser-trapped in air, as a probe. Using the microsphere as a lens also makes it possible to detect minute defects, and the lab has realized hybrid measurement that combines the two.
*Illustrative imageSurface Profile Measurement with an Optical Frequency Comb
The lab works on the laser inverse scattering method, which obtains surface topography from the phase of light scattered by a sample surface. Using an optical frequency comb as the light source enables measurement with high resolution and a wide dynamic range, based on a large amount of precise frequency information.
*Illustrative imageMeasuring Microcracks in Glass
The depth, length, and direction of minute cracks on a glass surface are determined from the periodic pattern formed by backscattered light when a laser is applied. The lab is also working on measuring the change in stress around a crack by Raman spectroscopy.
*Illustrative imageMicro-fabrication with Photonic Nanojets
Using a special light beam called a photonic nanojet, the lab has realized ablation machining with a processing resolution at the sub-micrometer scale. It also conducts research that measures the shock waves generated during machining in situ to examine how the process progresses.
MembersFaculty
The Takaya-Mizutani Lab consists of faculty, doctoral, master's, and undergraduate students, and administrative assistants.As of 2025
- ProfessorYasuhiro Takaya
- Associate ProfessorYasuhiro Mizutani
- Assistant ProfessorTsutomu Uenohara
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “NASA Tests LISA Development Units (SVS14955 - LISA TVAC-9)” NASA's Scientific Visualization Studio - eMITS/Sophia Roberts, eMITS/Scott Wiessinger, University of Maryland College Park/Jeanette Kazmierczak, ADNET Systems, Inc./Aaron E. Lepsch / Public domain (cropped)
- 3D Measurement with a Nano-CMM: “5 Axis Scanning Coordinate Measurement Machine (CMM)” AB Technology (Newark) Ltd. / CC BY-SA 4.0 (cropped)
- Surface Profile Measurement with an Optical Frequency Comb: “Frequency Comb ( )” National Institute of Standards and Technology / Public domain (cropped)
- Measuring Microcracks in Glass: “Scattering of light” Jiří Šperka / CC BY-SA 4.0 (cropped)
- Micro-fabrication with Photonic Nanojets: “High precision laser ablation” Martin Schaier / CC BY 4.0 (cropped)
- Related lab (Composite Mechanisms Lab [Joining and Welding Research Institute]): “Material properties of metal powders for use in additive manufacturing ( )” National Institute of Standards and Technology / Public domain (cropped)
- Related lab (Microjoining Engineering Lab [Joining and Welding Research Institute]): “Soldering a 0805” Aisart / CC BY-SA 3.0 (cropped)
- Related lab (Digital Manufacturing Systems Lab): “Automation of foundry with robot” KUKA Roboter GmbH, Bachmann / Public domain (cropped)
- Related lab (Plasma Engineering Lab [Joining and Welding Research Institute]): “US Air Force (USAF) Technical Sergeant (TSGT) Jeffrey Wright, Aircraft Metal Technician, 52nd Equipment Maintenance Squadron (EMS), uses plasma arc cutting torch to destroy a 30mm g - DPLA - 08156ad581284cc3e5ed4337a5cb0c55” Department of Defense. American Forces Information Service. Defense Visual Information Center. 1994 / Public domain (cropped)
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