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ナノ・マイクロシステム工学
Showing the original Japanese · View translation
シリコンで目に見えないほど小さなセンサや機械をつくる研究室。
AboutAbout the lab
小さな機械でナノの世界を測る。
ナノ・マイクロシステム工学研究室は、
加速度センサや
MEMSの
小さな
Key terms
- MEMS
- 半導体の
微細加工技術で つくる、 センサや 可動部を もつ極小の 機械 （微小電気機械システム） - アクチュエータ
- 電気などの
エネルギーを 使って、 ものを 動かす装置 - ナノギャップ
- ナノメートル
（10億分の 1メートル） 単位の、 ごく 狭い すき間
NewsLab news
View More ↗ResearchResearch themes
シリコンの
*Illustrative imageセンサとアクチュエータの開発
静電容量型の
*Illustrative imageシリコンの微細加工技術
シリコンを
*Illustrative image小さな機械でナノの世界を測る
MEMSの
*Illustrative image小さな機械を長く安定して動かす
MEMSは
MembersFaculty
- Professor土屋 智由
- Associate Professor廣谷 潤
- Assistant Professor霜降 真希
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Write a lab reviewAnonymous · Your draft is saved if you stopRelatedLabs similar to ナノ・マイクロシステム工学
マイクロ加工システム工学部 物理工学科マイクロ・ナノデバイスに
固体力学工学部 物理工学科ミクロな
機械機能要素工学工学部 物理工学科機械を
熱物理工学工学部 物理工学科ナノ~マクロスケールのThe information on this page is compiled by the LabLog team from the lab's public information and interviews. For corrections or removal requests, please contact LabLog, not the lab.
Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “A MicroVision MEMS mirror” S2upidOnReddit / CC BY-SA 4.0 (cropped)
- センサと
アクチュエータの 開発: “FreescaleSemiconductor 3-Axis-MEMS-Accelerometer MMA8452Q 10953-01b” SparkFun / CC BY 2.0 (cropped) - シリコンの
微細加工技術: “Photolithography lab in the LCN cleanroom” University College London Faculty of Mathematical & Physical Sciences / CC BY 2.0 (cropped) - 小さな
機械で ナノの 世界を 測る : “AFM (used) cantilever in Scanning Electron Microscope, magnification 3000x” AFM_(used)_cantilever_in_Scanning_Electron_Microscope,_magnification_3000x.GIF: SecretDisc derivative work: Materialscientist (talk) / CC BY-SA 3.0 (cropped) - 小さな
機械を 長く 安定して 動かす: “ИХ термостабилизированный электромеханический фильтр, московский НИИ радиосвязи 1990 (05)” 155LA3 / CC BY 4.0 (cropped) - Related lab (マイクロ加工システム): “Danos Cristalográficos 5” Hebert Folli / CC BY-SA 4.0 (cropped)
- Related lab (固体力学): “Transmission electron microscope (Morgagni 268D) 2pl” Pleple2000 / CC BY-SA 3.0 (cropped)
- Related lab (機械機能要素工学): “Ball-bearing-numbered” Niabot / CC BY-SA 3.0 (cropped)
- Related lab (熱物理工学): “3D Turbulence Infinitesimal Fluid Element Stretching Orientation Map” Terry Brannigan / CC BY 4.0 (cropped)
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