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Nano and Micro Systems Engineering Lab
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The lab builds sensors and machines too small to see, using silicon.
AboutAbout the lab
Measuring the nano world with tiny machines.
The Nano and Micro Systems Engineering Lab researches the fabrication of very small sensors and actuators (MEMS) through microfabrication centered on silicon.
The lab researches and develops devices such as acceleration sensors, angular velocity sensors, and tiny mirrors that steer light.
It also works on developing techniques that use MEMS devices to measure physical phenomena at the nanoscale.
The lab also studies reliability, so that tiny machines operate stably under vibration, shock, and changes in temperature.
Key terms
- MEMS
- Extremely small machines with sensors or moving parts, made with semiconductor microfabrication technology (microelectromechanical systems)
- Actuator
- A device that uses energy such as electricity to move things
- Nanogap
- An extremely narrow gap on the scale of nanometers (one billionth of a meter)
NewsLab news
View More ↗ResearchResearch themes
Using silicon microfabrication technology, the lab works on developing sensors and actuators, nanoscale measurement, and the reliability of micro and nano machines.
*Illustrative imageDeveloping Sensors and Actuators
Centered on capacitive transducers, the lab researches and develops sensors such as acceleration sensors and angular velocity sensors, and actuators such as optical elements. It works on 3-axis accelerometers, ring gyroscopes, and deformable mirrors.
*Illustrative imageSilicon Microfabrication Technology
The lab works on microfabrication and integration technologies centered on silicon. Its research includes emitter arrays for ionic-liquid electrospray thrusters and the fabrication of nanogaps by cleaving silicon.
*Illustrative imageMeasuring the Nano World with Tiny Machines
MEMS sensors measure extremely small forces and displacements with high precision. The lab applies this technology to measuring physical phenomena at the nanoscale and the properties of nanomaterials, investigating, for example, how energy is transported across nanogaps.
*Illustrative imageKeeping Tiny Machines Running Stably for a Long Time
MEMS are used in vehicles and portable devices, where they are subject to vibration, shock, and changes in temperature and humidity. The lab develops techniques to evaluate the mechanical reliability of MEMS and studies the strength and fatigue of silicon, their basic material.
MembersFaculty
- ProfessorToshiyuki Tsuchiya
- Associate ProfessorJun Hirotani
- Assistant ProfessorMasaki Shimofuri
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “A MicroVision MEMS mirror” S2upidOnReddit / CC BY-SA 4.0 (cropped)
- Developing Sensors and Actuators: “FreescaleSemiconductor 3-Axis-MEMS-Accelerometer MMA8452Q 10953-01b” SparkFun / CC BY 2.0 (cropped)
- Silicon Microfabrication Technology: “Photolithography lab in the LCN cleanroom” University College London Faculty of Mathematical & Physical Sciences / CC BY 2.0 (cropped)
- Measuring the Nano World with Tiny Machines: “AFM (used) cantilever in Scanning Electron Microscope, magnification 3000x” AFM_(used)_cantilever_in_Scanning_Electron_Microscope,_magnification_3000x.GIF: SecretDisc derivative work: Materialscientist (talk) / CC BY-SA 3.0 (cropped)
- Keeping Tiny Machines Running Stably for a Long Time: “ИХ термостабилизированный электромеханический фильтр, московский НИИ радиосвязи 1990 (05)” 155LA3 / CC BY 4.0 (cropped)
- Related lab (Micro Fabrication Systems Lab): “Danos Cristalográficos 5” Hebert Folli / CC BY-SA 4.0 (cropped)
- Related lab (Solid Mechanics Lab): “Transmission electron microscope (Morgagni 268D) 2pl” Pleple2000 / CC BY-SA 3.0 (cropped)
- Related lab (Functional Machine Elements Engineering Lab): “Ball-bearing-numbered” Niabot / CC BY-SA 3.0 (cropped)
- Related lab (Thermophysical Engineering Lab): “3D Turbulence Infinitesimal Fluid Element Stretching Orientation Map” Terry Brannigan / CC BY 4.0 (cropped)
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