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Micro-Nano Process Engineering Lab
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A lab that builds small machines such as MEMS, centered on microfabrication and materials development.
AboutAbout the lab
Built on microfabrication, from MEMS to materials development
The Hata Lab studies small machines such as MEMS (microelectromechanical systems) and medical devices from the perspectives of microfabrication, mechanical engineering, and materials.
To efficiently find new materials for MEMS, the lab also works on materials synthesis using combinatorial techniques and on methods for evaluating materials.
In recent years, the lab has also been working on materials evaluation and exploration using machine learning.
The lab has many joint research projects with companies, other universities, and research institutes, and it actively sends its students abroad and accepts international students.
Key terms
- MEMS
- Microelectromechanical systems. Small devices in which sensors and moving parts are built in using microfabrication technology
- Combinatorial technique
- A method of searching for new materials by making many samples with slightly different compositions together on a single substrate and evaluating them all at once
- Magnetic Barkhausen noise
- Small magnetic noise produced when an alternating magnetic field is applied to a material that can become a magnet, as the boundaries of the magnetic domains inside it move in discrete jumps
- Surface activated bonding
- A technique that removes oxide films and other layers from substrate surfaces to activate them, then bonds two substrates together at room temperature
NewsLab news
A doctoral student received the Miura Award from the Japan Society of Mechanical Engineers
A doctoral student received the Graduate Research Encouragement Award from the Society of Automotive Engineers of Japan
A master's student received the Outstanding Presentation Award for Young Researchers (Fellow Award) from the Japan Society of Mechanical Engineers
Prof. Hata received the Engineering Education Award from the Japanese Society for Engineering Education
ResearchResearch themes
Building on microfabrication in the micro- and nano-scale world, the lab studies new materials and methods for developing them, as well as their application to MEMS, micromachines, and medical devices. It covers a wide range of topics, from microfabrication to materials evaluation, materials creation, and applications.
*Illustrative imageSubstrates That Make the Most of Light in Solar Cells
The lab uses substrates whose glass surfaces are textured by nanoimprinting in dye-sensitized solar cells, which have low material and manufacturing costs, aiming to improve performance and reduce manufacturing costs.
*Illustrative imageEstimating Grain Size with Machine Learning
The lab studies a method that quickly estimates crystal grain size in a non-contact, non-destructive way by analyzing, with machine learning, the magnetic Barkhausen noise that appears when an alternating magnetic field is applied to magnetic materials.
*Illustrative imageA New Fast Atom Beam Source
For surface activated bonding, which is used for items such as filter devices for 5G and 6G communications, the lab is developing a longer-lived, more efficient fast atom beam source jointly with companies and another department.
*Illustrative imageMicrovalves Remotely Operated by Magnetic Fields
The lab is developing microvalves that can be opened and closed from a distance by using an alternating magnetic field to heat a thermoresponsive gel containing magnetic nanoparticles. They are intended for fluidic devices for drug delivery.
MembersFaculty
The members of the Hata Lab consist of faculty, doctoral, master's, and undergraduate students, and administrative assistants.As of 2026
- ProfessorSeiichi Hata
- Associate ProfessorYasuhiko Orita
- Assistant ProfessorChiemi Oka
VoicesStudent voices
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “MEMS ( )” Christopher/NIST (National Institute of Standards and Technology) / Public domain (cropped)
- Substrates That Make the Most of Light in Solar Cells: “Dye.sensitized.solar.cells” Ronald vera saavedra colombia (bogota)ISE / Public domain (cropped)
- Estimating Grain Size with Machine Learning: “Aluminium etched” Alchemist-hp (talk) (www.pse-mendelejew.de) / CC BY-SA 2.0 de (cropped)
- A New Fast Atom Beam Source: “Bell Jar 35 with Argon Plasma” Diener electronic GmbH + Co KG / CC BY-SA 4.0 (cropped)
- Microvalves Remotely Operated by Magnetic Fields: “Ferrofluid close” Opoterser / CC BY 3.0 (cropped)
- Related lab (Sensing Engineering Lab): “Atomic Force Microscope 01” Gannu03 / CC BY-SA 4.0 (cropped)
- Related lab (Production Process Engineering Lab): “Engineering Labs- Prototype Development Laboratory (PDL) (KSC-20201021-PH-JBS01 0259)” NASA Kennedy Space Center / NASA/Ben Smegelsky / Public domain (cropped)
- Related lab (Structural Mechanics Lab): “" 13 Fiat-Chrysler - Safety - Body Exterior Carbon Fiber Composite Roof Assembly SRT Viper” spe.automotive / CC BY 2.0 it (cropped)
- Related lab (Production Engineering Lab): “Machine Shop Men GPN” NASA Headquarters - GReatest Images of NASA (NASA-HQ-GRIN) / Public domain (cropped)
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