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田中(秀)・VERGARA・GUO 研究室
Showing the original Japanese · View translation
半導体の技術で小さなセンサをつくり、機械と人をつなぐ研究室。

AboutAbout the lab
MEMSは、人と機械をつなぐデバイス。
田中
LSIが
MEMSは
田中
Key terms
- MEMS
- 半導体の
微細加工技術で つくる、 とても 小さな センサや アクチュエータ - アクチュエータ
- 電気などの
エネルギーを 力や 動きに 変えて、 ものを 動かす部品 - 弾性波素子
- 圧電体を
伝わる 弾性波を 使い、 周波数の 選別などを 行う 部品
NewsLab news
田中
教授が、 情報通信月間推進協議会会長表彰 「志田林三郎賞」を 受賞 田中教授らが、
戦略的情報通信研究開発推進事業 (SCOPE) 研究開発奨励賞を 受賞 学生チームが、
SEMICON Japan の 学生アイディアソンで ラピダス賞を 受賞 研究室の
メンバーが、 センサ・マイクロマシンと 応用システムシンポジウムで 表彰
ResearchResearch themes
ロボット制御、
*Illustrative imageこれまでに開発したデバイス
圧力センサ、
*Illustrative imageMEMSの高度化と多様化
機能性材料を
*Illustrative image装置・材料・システムの開発
最先端の
MembersFaculty
田中
- Professor田中 秀治
- Associate Professor鈴木 裕輝夫
- Assistant ProfessorAndrea Vergara
- Assistant Professor郭 庸
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The information on this page is compiled by the LabLog team from the lab's public information and interviews. For corrections or removal requests, please contact LabLog, not the lab.
Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “AE National Semiconductor B9212 GAL16V8QS-25QNC c AST B AD” Epop / CC BY-SA 3.0 (cropped)
- これまでに
開発した デバイス: “Digital Barometer Sensor” Medvedev / CC BY-SA 3.0 (cropped) - MEMSの
高度化と 多様化: “A wafer consisting of MPC designs all over the wafer and five process control monitor (PCM) designs for ensuring good quality of the processing” Khpsoi / CC BY-SA 4.0 (cropped) - 装置・材料・システムの
開発: “A semiconductor wafer being removed from processing equipment” YouTube — Purdue Engineering / CC BY 4.0 (cropped) - Related lab (塚本 研究室): “Integrated-circuit-open” 作者不詳 / Public domain (cropped)
- Related lab (岡部・龍薗・三島 研究室): “" 13 Fiat-Chrysler - Safety - Carbon Fiber Composite Roof Assembly SRT Viper capote” spe.automotive / CC BY 2.0 it (cropped)
- Related lab (山本(剛) 研究室): “Carbon fiber pieces for Shell Eco-marathon prototype wheels Proto INSA Club” Proto INSA Club / CC BY-SA 4.0 (cropped)
- Related lab (山﨑・RANULFO 研究室): “ER-FLEX manipulator” Auledas / CC BY 4.0 (cropped)
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