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Tanaka-Vergara-Guo Lab
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The lab builds tiny sensors using semiconductor technology to connect machines and people.
AboutAbout the lab
MEMS as devices that connect people and machines
The Tanaka Lab studies MEMS, which are sensors and actuators made by semiconductor microfabrication.
If LSIs are the brains of a machine, MEMS correspond to its sensory organs, so they can also be described as devices that connect people and machines.
MEMS are widely used as pressure sensors, accelerometers, gyroscopes, and microphones, and are built into smartphones and cars.
The Tanaka Lab puts particular emphasis on industry-academia collaborative research and is carrying out joint research with many companies.
Key terms
- MEMS
- Very small sensors and actuators made with semiconductor microfabrication technology
- Actuator
- A component that converts energy such as electricity into force or motion to move things
- Acoustic wave device
- A component that uses acoustic waves traveling through a piezoelectric material to perform functions such as frequency selection
NewsLab news
Prof. Tanaka received the Rinzaburo Shida Award, a Commendation by the Chairman of the Information and Communications Month Promotion Council
Prof. Tanaka and colleagues received the Research and Development Encouragement Award of the Strategic Information and Communications R&D Promotion Programme (SCOPE)
A student team won the Rapidus Award at the SEMICON Japan student ideathon
Lab members received an award at the Symposium on Sensors, Micromachines, and Applied Systems
ResearchResearch themes
The lab works on the research and development of micro- and nano-systems that contribute to robot control, advanced information and communications, health, safety, and energy saving. The lab's core technologies are MEMS, acoustic wave devices, and integrated packaging technology.
*Illustrative imageDevices Developed to Date
The lab has researched and developed a wide range of devices, including pressure sensors, gyroscopes, acoustic wave filters, microvalves, optical scanners, and integrated biosensors, and through active industry-academia collaboration it has put many of these technologies into practical use.
*Illustrative imageAdvancing and Diversifying MEMS
The lab works on the research and development of MEMS that use functional materials, MEMS integrated with integrated circuits, MEMS based on nanotechnology, new biomicrodevices, and the systemization of these.
*Illustrative imageDevelopment of Equipment, Materials, and Systems
In addition to prototyping state-of-the-art MEMS, the lab also develops the equipment and materials needed for that work, as well as systems that use MEMS.
MembersFaculty
The members of the Tanaka Lab consist of faculty, research staff, administrative staff, doctoral, master's, and undergraduate students, research students, exchange students, and visiting members.As of 2026
- ProfessorShuji Tanaka
- Associate ProfessorYukio Suzuki
- Assistant ProfessorAndrea Vergara
- Assistant ProfessorYong Guo
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “AE National Semiconductor B9212 GAL16V8QS-25QNC c AST B AD” Epop / CC BY-SA 3.0 (cropped)
- Devices Developed to Date: “Digital Barometer Sensor” Medvedev / CC BY-SA 3.0 (cropped)
- Advancing and Diversifying MEMS: “A wafer consisting of MPC designs all over the wafer and five process control monitor (PCM) designs for ensuring good quality of the processing” Khpsoi / CC BY-SA 4.0 (cropped)
- Development of Equipment, Materials, and Systems: “A semiconductor wafer being removed from processing equipment” YouTube — Purdue Engineering / CC BY 4.0 (cropped)
- Related lab (塚本 研究室): “Integrated-circuit-open” 作者不詳 / Public domain (cropped)
- Related lab (岡部・龍薗・三島 研究室): “" 13 Fiat-Chrysler - Safety - Carbon Fiber Composite Roof Assembly SRT Viper capote” spe.automotive / CC BY 2.0 it (cropped)
- Related lab (山本(剛) 研究室): “Carbon fiber pieces for Shell Eco-marathon prototype wheels Proto INSA Club” Proto INSA Club / CC BY-SA 4.0 (cropped)
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