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三田研究室
Showing the original Japanese · View translation
半導体の微細加工で、電気と機械が溶け合う素子をつくる研究室。

AboutAbout the lab
自然の機能に学ぶ、集積化マイクロシステム。
三田研究室は、
電子工学の
武田先端知ビルの
MEMSと
Key terms
- MEMS
- 機械の
部品と 電子回路を、 半導体の 微細加工で 小さな チップの 上に つくる 技術 - モノリシック集積
- 別々に
つくっていた 部品を、 1枚の チップの 上に まとめて つくりこむこと - フォトダイオード
- 光が
当たると 電気が 流れる 半導体の 素子。 光を 電気の 信号に 変えるのに 使う
NewsLab news
学部の
学生が、 工学部長賞 (研究)と 優秀卒業論文賞を 受賞 修士課程の
学生が、 優秀修士論文賞を 受賞 センサ・マイクロマシンと
応用システムシンポジウムの フォトコンテストで 最優秀賞 博士課程の
学生が、 電気学会 優秀論文発表賞を 受賞 修士課程の
学生が、 工学系研究科長賞と 電気系工学専攻長賞を 受賞
ResearchResearch themes
電気と
*Illustrative imageMEMS-LSIモノリシック集積
標準の
*Illustrative image微細な側壁を壊さずに測る
深い
*Illustrative imageディープトレンチ垂直フォトダイオード
深い
*Illustrative imageマイクロラッチ機構
消費電力が
MembersFaculty
三田研究室の
- Professor三田 吉郎Publications ↗
- Project Associate Professor中根 了昌Publications ↗
- Project Associate Professor肥後 昭男
- Assistant Professor安永 竣Publications ↗
VoicesStudent voices
Compiled from answers by students who were in the lab. Ratings and reviews reflect individual students' experiences, not the lab's official views.
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On a 4-point scale, ● marks where students' answers fall
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RelatedLabs similar to 三田研究室
The information on this page is compiled by the LabLog team from the lab's public information and interviews. For corrections or removal requests, please contact LabLog, not the lab.
Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “MEMS Microcantilever in Resonance” Patrick C. Fletcher (talk) 17:48, 20 May 2008 (UTC) / CC BY-SA 3.0 (cropped)
- MEMS-LSIモノリシック集積: “Microelectromechanical system (MEMS) ( )” National Institute of Standards and Technology / Public domain (cropped)
- 微細な
側壁を 壊さずに 測る : “Slantedblacksilicon” Zhida Xu, Jing Jiang, Manas Ranjan Gartia, and Gang Logan Liu / CC BY-SA 4.0 (cropped) - ディープトレンチ垂直フォトダイオード: “Photodiode array chip” Fulvio314 / CC BY-SA 3.0 (cropped)
- マイクロラッチ機構: “MEMS-based compliant mechanism” Agustin Herrera-May / CC BY-SA 4.0 (cropped)
- Related lab (田畑・松井・関研究室): “Pulsed Laser Deposition in Action” Adam Andersen Læssøe / CC BY-SA 4.0 (cropped)
- Related lab (高宮研究室): “TI HC32 Die Shot (4x2-Input OR Gate)” Cole L / CC BY-SA 2.0 (cropped)
- Related lab (トープラサートポン研究室): “Ferroelectric domains at a PZT grain boundary ( )” Oak Ridge National Laboratory / CC BY 2.0 (cropped)
- Related lab (竹中研究室): “Silicon Photonics 300mm wafer” Ehsanshahoseini / CC BY-SA 4.0 (cropped)
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