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機能性無機材料×エキシマレーザー研究室
Showing the original Japanese · View translation
エキシマレーザーと酸化物材料で新しい半導体をつくる研究室。
AboutAbout the lab
紫外線レーザーを用いた新しい半導体製造の研究。
薮田研究室は、
エキシマレーザーと
低温プロセスで
研究室の
Key terms
- エキシマレーザー
- 強力な
紫外線パルス光を 出す装置。 半導体材料の 特性を 変えたり、 薄膜を 形成したりするのに 使う - リソグラフィー
- 半導体デバイス製造の
工程の 1つ - 酸化物半導体
- 酸化物で
できた 半導体材料。 IGZOなどが あり、 低温プロセスで 優れた 半導体 特性を 示すものを 研究している
NewsLab news
β-Ga2O3への
レーザードーピングの 熱シミュレーションの 論文が、 Japanese Journal of Applied Physics に 掲載 KrFエキシマレーザーに
よる β-Ga2O3への Snドーピングの 論文が、 Applied Physics A に 掲載
ResearchResearch themes
薮田研究室は、
*Illustrative image深紫外レーザーによる半導体製造
エキシマレーザーの
*Illustrative image酸化物半導体・誘電体材料の研究
低温プロセスで
MembersFaculty
薮田研究室の
- Professor薮田 久人
VoicesStudent voices
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Excimer laser 1” IoOALP / CC BY-SA 4.0 (cropped)
- 深紫外レーザーに
よる 半導体製造: “Excimer-Laser-MEL80” Philos2000 / CC BY-SA 3.0 (cropped) - 酸化物半導体・誘電体材料の
研究: “Chitosan Thin Film II” D.S. Soriano / CC BY-SA 4.0 (cropped) - Related lab (レーザー・光応用研究室): “Laser weld on helium-filled hard drive” Phiarc / CC BY-SA 4.0 (cropped)
- Related lab (電磁エネルギー応用研究室): “Electric Motor at the former Lukens Steel Company mill house” Nolabob / CC BY-SA 4.0 (cropped)
- Related lab (制御と
最適化の 研究室): “Robots header” RealAws / CC BY-SA 4.0 (cropped) - Related lab (構成エレクトロニクス研究室): “Neuromorphic Nanowire Network” DrHughManning / CC BY-SA 4.0 (cropped)
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