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Functional Inorganic Materials × Excimer Laser Lab
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The lab creates new semiconductors using excimer lasers and oxide materials.
AboutAbout the lab
Research on new semiconductor manufacturing using ultraviolet lasers.
The lab studies new manufacturing processes for semiconductor devices using ultraviolet lasers, as well as new semiconductor and dielectric materials, mainly oxides.
Using excimer lasers, which are devices that emit powerful pulses of ultraviolet light, the lab develops manufacturing processes that change the properties of semiconductor materials or form semiconductor thin films through ultraviolet irradiation.
The lab also conducts research on the physical properties of oxide semiconductors that show excellent semiconductor characteristics in low-temperature processes, along with device development, and research on the physical properties of dielectric, piezoelectric, and ferroelectric materials, along with development of device applications.
On the lab's website, it is introduced under the name "Yabuta Lab."
Key terms
- Excimer laser
- A device that emits powerful pulses of ultraviolet light. It is used to change the properties of semiconductor materials and to form thin films.
- Lithography
- One of the steps in semiconductor device manufacturing.
- Oxide semiconductor
- A semiconductor material made of oxides, such as IGZO. The lab studies those that show excellent semiconductor characteristics in low-temperature processes.
NewsLab news
A paper on thermal simulation of laser doping into β-Ga2O3 has been published in Japanese Journal of Applied Physics
A paper on Sn doping into β-Ga2O3 using a KrF excimer laser has been published in Applied Physics A
ResearchResearch themes
The lab studies new manufacturing processes for semiconductor devices using ultraviolet lasers, as well as new semiconductor and dielectric materials, mainly oxides. By developing new semiconductor devices and materials that will be useful to society in the future, the lab aims to train people who can contribute to industry.
*Illustrative imageSemiconductor Manufacturing with Deep Ultraviolet Lasers
The lab develops manufacturing processes that use ultraviolet irradiation from excimer lasers to change the properties of semiconductor materials or to form the semiconductor thin films that devices require. Through joint research with a laser manufacturer, the lab uses high-performance lasers employed in lithography to research and develop other new process technologies.
*Illustrative imageResearch on Oxide Semiconductors and Dielectric Materials
The lab studies the physical properties of oxide semiconductors (such as IGZO) that show excellent semiconductor characteristics in low-temperature processes, and develops devices with them. It also studies items such as complementary oxide semiconductor transistors that use n-type and p-type oxide semiconductors on the same device. In addition, the lab conducts research on the physical properties of dielectric materials used for gate insulating films and capacitor films, and of piezoelectric and ferroelectric materials used in devices such as ultrasonic transducers, along with development of device applications.
MembersFaculty
The members of the Yabuta Lab consist of faculty, research fellows, a visiting professor, and doctoral, master's, and undergraduate students.As of 2026
- ProfessorHisato Yabuta
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Excimer laser 1” IoOALP / CC BY-SA 4.0 (cropped)
- Semiconductor Manufacturing with Deep Ultraviolet Lasers: “Excimer-Laser-MEL80” Philos2000 / CC BY-SA 3.0 (cropped)
- Research on Oxide Semiconductors and Dielectric Materials: “Chitosan Thin Film II” D.S. Soriano / CC BY-SA 4.0 (cropped)
- Related lab (Laser and Optical Applications Lab): “Laser weld on helium-filled hard drive” Phiarc / CC BY-SA 4.0 (cropped)
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