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Plasma Engineering Lab
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A lab that uses plasma to make semiconductors and grow crops.
AboutAbout the lab
Plasma engineering for the society of the future
The Plasma Engineering Lab studies the interaction between plasma, which is ionized gas, and materials, with the aim of creating next-generation plasma processes.
Plasma is a core technology used widely, from advanced manufacturing such as semiconductor fabrication to the environmental and agricultural fields.
In semiconductors, the lab combines plasma diagnostics, materials analysis, and numerical simulation to advance the processes that support the manufacture of advanced devices such as AI chips.
The other pillar is plasma agriculture. The lab irradiates seeds with plasma to promote germination and growth, and works to increase harvest yields.
Key terms
- Plasma
- A state in which strong energy is applied to a gas so that atoms split into electrons and ions that move about freely
- Plasma CVD
- A film deposition method that uses plasma to deposit a solid thin film from a source gas onto a substrate
- Nitrogen fixation
- Converting nitrogen in the air into compounds that plants can take up as nutrients
NewsLab news
Professor Koga and colleagues publish a review on plasma agricultural science, which contributes to increasing crop yields
A student receives the Excellent Poster Award at the 19th Plasma Electronics Incubation Hall
ResearchResearch themes
Building on plasma engineering, the lab aims to understand the interaction between plasma and materials and to create next-generation plasma processes. Its research spans basic science to societal applications, from advanced processes that support semiconductor manufacturing to plasma agriculture for growing crops.
*Illustrative imageGrowing seeds with plasma
Irradiating seeds with plasma can promote germination and increase harvest yields. It has also become clear that the ABA/GA hormone balance and DNA methylation change.
*Illustrative imageNitrogen fertilizer made with plasma
Plasma produces nitrogen fertilizer through chemical reactions. The lab works on this nitrogen fixation by first controlling the pressure surrounding the plasma and then controlling the electron temperature.
*Illustrative imageCarbon thin films made at low temperature
Plasma CVD makes it possible to produce diamond-like carbon (DLC) films using nanoparticle composite materials, through a low-temperature process suited to the semiconductor industry.
*Illustrative imageDesigning processes with AI and physics
First, the lab measures plasma accurately to understand the physics and clarify the interaction between materials and plasma. It then combines AI with accumulated knowledge from plasma and materials science, leading to process design that makes prediction possible.
MembersFaculty
The members of the Plasma Engineering Lab consist of faculty, technical staff, postdoctoral researchers, and master's and undergraduate students.
- ProfessorKazunori Koga
- Associate ProfessorKunihiro Kamataki
- Associate ProfessorTakamasa Okumura
- Associate ProfessorPankaj Attri
VoicesStudent voices
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Plasma globe 60th” Colin / CC BY-SA 3.0 (cropped)
- Growing seeds with plasma: “Delonix regia germinating seeds” Thebirdbrand / CC BY-SA 4.0 (cropped)
- Nitrogen fertilizer made with plasma: “Clover root nodules” Bwiltz / CC BY-SA 4.0 (cropped)
- Carbon thin films made at low temperature: “Thin Film Interference Soap Bubble” Pksois23 / CC BY-SA 4.0 (cropped)
- Designing processes with AI and physics: “Go” Dietmar Rabich / CC BY-SA 4.0 (cropped)
- Related lab (インテリジェントモデリング研究室): “Geodesic grid MPAS ocean simulation vorticity 4096x4096” Jinrong Xie / CC BY-SA 4.0 (cropped)
- Related lab (機能発現集積システム研究室): “SJ3159 die” Mister rf / CC BY-SA 4.0 (cropped)
- Related lab (イメージ・メディア理解研究室): “USB webcam for PC” WrS.tm.pl / CC0 (cropped)
- Related lab (認知科学研究室): “'Let the Games Begin' Soldiers Train on Virtual Driving Simulator DVIDS106870” Spc. Elayseah Woodard-Hinton / Public domain (cropped)
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