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Device Process Engineering Lab
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The lab stacks atomic layers to create materials and devices for energy.

AboutAbout the lab
From atomic layers to devices
The Device Process Engineering Lab studies new ways of making materials and devices to help solve energy problems.
Using thin-film fabrication techniques that control structure and composition at the atomic level, the lab creates oxide thin films with new structures and functions.
Using methods such as terahertz spectroscopy with ultrashort-pulse lasers, the lab investigates the motion of electrons and ions inside materials.
The lab handles the whole process consistently, from material synthesis to device fabrication and the measurement and analysis of properties.
Key terms
- Thin film
- A very thin film with a thickness ranging from a few atoms to several micrometers
- All-solid-state battery
- A battery made entirely of solids, including the electrolyte, with less risk of leakage or fire
- Terahertz wave
- An electromagnetic wave lying between radio waves and light, which can reveal the motion of electrons and ions inside matter
NewsLab news
Research on Li-ion batteries using LiCoO₂ thin films on aluminum substrates as the cathode was published in ECS Journal of Solid State Science and Technology
A paper on Li-ion batteries using LiCoO₂ thin films made by ion-beam-assisted deposition as the cathode was published in Journal of The Electrochemical Society
ResearchResearch themes
Solving energy problems requires major steps forward in materials and devices for each of energy harvesting, energy saving, and energy storage. Without being bound by conventional field boundaries, the lab develops materials and device processes drawing on physics, chemistry, and engineering.
*Illustrative imageBuilding Thin-Film All-Solid-State Batteries
Thin-film lithium-ion batteries are thinner and lighter than conventional batteries, and have the advantages of higher energy density and faster charging. The lab aims to integrate them with other functions.
*Illustrative imageProbing Materials from the Inside with Terahertz Waves
Terahertz spectroscopy is a technique that reads the interaction between light and matter in a frequency range that earlier spectroscopic methods could not measure. The lab uses this approach to evaluate materials and devices such as wide-bandgap semiconductors, solar cells, and storage batteries.
MembersFaculty
The members of the Device Process Engineering Lab consist of faculty members, researchers, administrative assistants, doctoral and master's students, undergraduate students, and research students.As of 2026
- ProfessorIwao Kawayama
- Project Assistant ProfessorRAZANOELINA Manjakavahoaka
VoicesStudent voices
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Report an errorAbout the images
The top and research theme images are illustrative and were not taken at the lab. They are cropped from Wikimedia Commons images. Cropped CC BY-SA images are provided under the same CC BY-SA license as the original (version shown on each line).
- Top image: “Unmetallised Silicon Heterojunction solar cell precursor” Radiotrefoil / CC BY-SA 4.0 (cropped)
- Building Thin-Film All-Solid-State Batteries: “Salar de Olaroz, Jujuy, Argentina” Coordenação-Geral de Observação da Terra/INPE / CC BY-SA 2.0 (cropped)
- Probing Materials from the Inside with Terahertz Waves: “Light dispersion of a mercury-vapor lamp with a flint glass prism IPNr°0125” D-Kuru / CC BY-SA 3.0 at (cropped)
- Related lab (Nanoprocess Engineering Lab): “Microscopy Lab Tour at the Colorado School of Mines” SparkFun Electronics from Boulder, USA / CC BY 2.0 (cropped)
- Related lab (Electronic Materials and Physical Properties Engineering Lab): “AFM-Raman-TERS” AAMonitor96 / CC BY-SA 3.0 (cropped)
- Related lab (Photonic Quantum Information Engineering Lab): “FMN Lab single photon detector” FMNLab / CC BY 4.0 (cropped)
- Related lab (Biocybernetics Lab (formerly Biomedical Engineering)): “Flavia Saraiva 2016 Olympics Test Event event finals 1” Miriam Jeske / CC BY 3.0 br (cropped)
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